Park Systems was delighted to introduce their high resolution and automatic Tip Scanning Head (TSH) for industrial large sample atomic force microscopes over 300mm. The Tip Scanning Head released is the Park NX-TSH.
The Park NX-TSH has been specifically designed by Park Systems for large and heavy sample flat panel display glass and features conductive AFM for electric defect analysis by integrating a micro probe station. The company launched the Tip Scanning Head at Semicon China, which as in June this year.
The Tip Scanning Head (TSH) is an automated moving tip head, designed for industrial atomic force microscopy measurements on large samples of over 300 mm. These are developed for OLED, LCD and Photonics for large sample analysis. The automated Tip Scanning Head is able to move on air bearing stage technology that combines x, y, z scanners to move to the desired point on the substrate with ease.
The Park NX-TSH system is able to overcome nanometrology challenges by using a gantry style tip scanner system. The system moves directly to a place on the sample and produces high resolution images of the roughness measurement, step height measurement, critical dimension and sidewall measurements.
Keibock Lee, the President at Park Systems, said “The Park NX-TSH can scan tip in x, y and z directions, up to 100 µm x 100 μm (x-y direction) and 15 μm z direction, and has flexible chuck to accommodate large and heavy samples. As the demand for larger flat panel displays increases to 65 in., 75 in. and more, Park NX-TSH overcomes these challenges with an automated tip scanning system and nano metrology challenges with a gantry style tip scanner system.”
The sample is fixed on a sample chuck and the tip scanning head attached to the gantry moves to measurement positions on the surface sample. The Park NX-TSH tip scanning head system overcomes the limitations of sample size and weight since the sample is fixed on the sample chuck.
Park Systems remains a leading choice for AFM systems on a global scale and the team are delighted with their success as the demand for their quality range of products and services continues to soar in the third quarter of 2020.
About Us: Park Systems is a leading supplier of AFM systems. This well-established company provides their clients with years of knowledge and experience in the industry. They comprise of a dedicated team of experienced professionals who focus on providing the highest level of service and support to their clients on a daily basis. Park Systems design their system with care and attention to detail. They are focus driven and have built up a solid reputation on a global scale. The company has a global sales network providing thirty years of experience with over 1,000 AFM’s available. They are the fastest growing AFM company with more than one hundred and twenty full time employees. To find out more, visit https://parksystems.com/